TMFM6000 Type: Mass Flow Meter

TMFM6000 Type: Mass Flow Meter

  • Detachable displays can be placed away from the flow channel via specially designed cables
  • Standard 4~20mA or RS485 for remote data communication.
  • Sanitary stainless steel (SUS) body is available for oxygen metering.
  • Extended range capability for precise flow monitoring
  • Intrinsically safe enclosure.

Description

  • Detachable displays can be placed away from the flow channel via specially designed cables
  • Standard 4~20mA or RS485 for remote data communication.
  • Sanitary stainless steel (SUS) body is available for oxygen metering.
  • Extended range capability for precise flow monitoring
  • Intrinsically safe enclosure.

What is a Thermal Mass Flow Meter?

Thermal Mass Flow Meteris an accurate, easy-to-install, low pressure drop flowmeter. It is suitable for flow measurement and control of dry gas applications. can alsoby gas typeReference linkapplication toObtain a thermal mass flow meter. A mass flow meter observes the cooling effect on the transducer it heats as a function of airflow. The result achieves a high level of accuracy at low cost compared to other gas flow measurement devices.

benefit:

  • ·High accuracy
  • Wide flow range, including low flow
  • · Simple, durable construction
  • ·Easy to install and maintain
  • Flexible connection of flow meters for flow control
  • · Various process connections
  • ·Tuning ratio 100:1
  • Low pressure drop across the flow meter
  • ·Provide convenient signal output

Thermal Mass Flow Meter Principle

Thermal Mass Flow MeterUse the thermal properties of the fluid to measure the motion of the fluid in a pipe or tube. In a thermal energy flow meter, the measured heat is applied to the heater of the sensor. A certain amount of energy is lost during the flow, and as the flow increases, more energy is lost. The energy lost by the sensor depends on the thermal properties of the fluid and the sensor design. The thermocompressive properties of fluids can vary with temperature and pressure, although these changes are usually insignificant in most applications. Since thermal flow measurement does not depend on the temperature or pressure of the fluid, thermal energy flow meters can be used to estimate the mass flow of the fluid.

In other words, in most applications, the properties of a fluid may depend on its composition. For these applications, different compositions of the fluid may interfere with the heat flow size during actual operation. Therefore, forThermal Mass Flow MeterIt is important for the provider to understand the composition of the fluid so that the appropriate normalization factors can be processed to accurately determine the flow rate. Due to this limitation,Thermal Mass Flow MeterUsually used to measure the flow of pure gas. Manufacturers can provide appropriate standardized information for other gas combinations, butThermal Mass Flow MeterThe accuracy of the depends on whether the actual gas mixture is the same as the gas mixture used for normalization purposes.

Technical Specifications

series TMFM6012 TMFM6019
Flow range (N2) 0.3~200,300SLM 0.8~600,800SLM
Turndown ratio 100:1
precision ±1.5 % FS
Redisplay accuracy ±0.75 % FS
Pressure resistance 1.0Mpa
leak rate 1 x 10-9 atm.cc/sec or less
range of working temperature -10~55℃,<95%RH
Materials for contact parts with gas Body: SUS316
Connection size 1/2″(DN12mm) 3/4″(DN19mm)
interface NPT, BSPT, or customer specified
Option: 1/2″, 3/4″ compression, VCR™
flow output signal 4~20mA or RS-485
demand voltage +8~24Vdc/35mA

Application field

What is MFM

A mass flowmeter, also known as an inertial flowmeter, is a device that measures the mass flow of a fluid through a pipe. Mass flow rate is the mass of fluid passing a fixed point per unit of time.
A mass flow meter does not measure the volume per unit of time (eg, cubic meters per second) passing through the device; it measures the mass per unit of time (eg, kilograms per second) flowing through the device. Volume flow is mass flow divided by fluid density. If the density is constant, the relationship is simple. The relationship is not simple if the fluid has a varying density. The density of fluids may vary with temperature, pressure or composition. The fluid can also be a combination of phases, such as a fluid with entrained air bubbles. Since the speed of sound depends on the controlled liquid concentration, the actual density can be determined. [1]

MFM application
1. Smart Pipe Monitor
The main reason thermal mass flow meters are popular in industrial applications is the way they are designed and manufactured. They have no moving parts, have virtually no obstruction to a straight flow path, require no temperature or pressure correction, and maintain accuracy over a wide flow range. Straight pipe runs can be reduced by using a double plate flow conditioning element, and the installation is very simple and does not cause pipe intrusion.

However, in many applications the thermal properties of the fluid may depend on the fluid composition. In such applications, changes in fluid composition during actual operation can affect heat flow measurements. Therefore, it is important for thermal flow meter suppliers to understand the composition of the fluid so that the appropriate calibration factors can be used to accurately determine flow. Vendors can provide appropriate calibration information for other gas mixtures, but the accuracy of thermal flow meters depends on the actual gas mixture being the same as the one used for calibration purposes. In other words, the accuracy of a thermal flow meter calibrated for a given gas mixture will be reduced if the gas actually flowing has a different composition. [2]

2. CVD machine
What is CVD

Vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, high-performance solid materials. This process is commonly used in the semiconductor industry to produce thin films.

In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors that react and/or decompose on the surface of the substrate to produce the desired deposits. Volatile by-products are also typically produced, which are removed by the gas flow through the reaction chamber.

Microfabrication processes widely use CVD to deposit various forms of materials including: single crystal, polycrystalline, amorphous and epitaxy. These materials include: silicon (carbon dioxide, carbides, nitrides, oxynitrides), carbon (fibers, nanofibers, nanotubes, diamond and graphene), fluorocarbons, filaments, tungsten, titanium nitride and various high k dielectric.

 

3. Valve Box/Panel (VMB/VMP)
What is VMB/VMP

Through our experience in handling gases, we have gained the knowledge to design and manufacture panels (gas boxes) for EPI systems, MOCVD, material supply systems and more.
Among our business achievements, we are able to design and manufacture products that meet customer requirements (price and specifications). We can handle not only normal gas but also liquefied gas supply for hub rings. We also support various legal applications.

Flow range

series TMFM6012 TMFM6019
Flow range (N2) 0.3~200,300SLM 0.8~600,800SLM
Turndown ratio 100:1
precision ±1.5 % FS
Redisplay accuracy ±0.75 % FS
Pressure resistance 1.0Mpa
leak rate 1 x 10-9 atm.cc/sec or less
range of working temperature -10~55℃,<95%RH
Materials for contact parts with gas Body: SUS316
Connection size 1/2″(DN12mm) 3/4″(DN19mm)
interface NPT, BSPT, or customer specified
Option: 1/2″, 3/4″ compression, VCR™
flow output signal 4~20mA or RS-485
demand voltage +8~24Vdc/35mA

Order model

Order model
TMFM60 coding subcoding Flow range                
 

 
12 20 0.3~200SLM (standard type)
  12 30 0.9~300SLM
  19 60 0.8~600SLM (standard type)
  19 80 1.12~800SLM
   

 
  coding fluid type
      A Air
      N Nitrogen (N2)
      O Oxygen (O2)
      C Argon (Ar)
      E carbon dioxide (CO2)
      H Helium (He)
      S Special gases (for other gases, please contact the customer service center)
       

 
coding pressure range
        XXX XXX Mpa e,g.03.0Mpa->fill in 030 (maximum working pressure)
         

 
coding output signal
          A 4~20mA
          B RS-485
           

 
coding Connection size
            12 1/2″ (for TMFM6012)
            19 3/4″ (for TMFM6019)
              coding interface
              N NPT
              B BSPT
              A Compression SWL
              V Male VCR
                coding monitor
                D with monitor
                N no display
                  coding label
                  E FGT trademark
                  X Customized logo
             

 
         
TMFM60                   Complete order model
*Note: All models come with power supply (+8~24 Vdc/35mA)
*Note: OEM orders are available for orders over 100
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