TMFC125 類型:質量流量控制器

TMFC125 類型:質量流量控制器

  • Highly Accuracy at Low Flow
  • Fast Response≦2.0 sec
  • Wide Pressure Range Available(1000 PSIG)
  • No Leakage
  • No Temperature or Pressure Required
  • Connection compatible
  • High stable removable sensor
  • Corrosion resistance Value
  • Excellent Linearity
  • Excellent long term Stability
  • Modular design
  • Compact Flow Control System
  • With RS-485 function
  • Option function:Interface and Separate Type
  • ™Option Display with Digital: RS485 (default) / DeviceNet

描述

  • 低流量下的高精度
  • 快速響應≦2.0 秒
  • 可提供寬壓力範圍(1000 PSIG)
  • 無洩漏
  • 無需溫度或壓力
  • 連接兼容
  • 高穩定性可拆卸傳感器
  • 耐腐蝕值
  • 出色的線性度
  • 出色的長期穩定性
  • 模塊化設計
  • 緊湊型流量控制系統
  • 具有RS-485功能
  • 選項功能:接口和分離類型
  • ™ 數字顯示選項:RS485(默認)/DeviceNet

Technical Specifications

Model TMFC125V TMFC125VD TMFC125A TMFC125AD
Flow Range(N2) 30~100SLM 30~100SLM 30~100SLM 30~100SLM
Response Time ≦2.0 sec
Accuracy ±1.0 % FS
Repeatabllity ±0.25 % FS
Proof Pressure 1000 PSIG
Leak rate 1 x 10-9 atm.cc/sec or less
Working temperature Range 0~50℃
 

Materials of parts in contact w/gases

Body:SUS316
Valve seat:Vition™(Option Bura™ or Kalrez™ or Teflon™)
 

Joint

Standard:3/8″ compression
Option: 1/8″ Compression or VCR™, 1/4 Compression or VCR™
Electrical connections Dsub 15-pin male connector per standards
Flow rate input signals 0~5 Vdc 0~5 Vdc+RS-485 4~20mA 4~20mA+RS-485
Flow rate output signals 0~5 Vdc 0~5 Vdc+RS-485 4~20mA 4~20mA+RS-485
Required power supply +15~28 Vdc/350mA
 

 

Option display

Use to Type ◎Yes No ◎Yes No
Display interface Option:Interface or Separate Type(With Cable Line 1M or 3M) for TMFC125V/A only
communication

Interface

Digital: RS485 (default) / DeviceNet™ for TMFC125V/A only
Power supply AC110~240 V for TMFC125V/A only

Application

What is MFC

mass flow controller (MFC) is a device used to measure and control the flow of gases.[1] A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow rates. The MFC can be given a setpoint from 0 to 100% of its full scale range but is typically operated in the 10 to 90% of full scale where the best accuracy is achieved. The device will then control the rate of flow to the given setpoint. MFCs can be either analog or digital. A digital flow controller is usually able to control more than one type of fluid whereas an analog controller is limited to the fluid for which it was calibrated.

All mass flow controllers have an inlet port, an outlet port, a mass flow sensor and a proportional control valve. The MFC is fitted with a closed loop control system which is given an input signal by the operator (or an external circuit/computer) that it compares to the value from the mass flow sensor and adjusts the proportional valve accordingly to achieve the required flow. The flow rate is specified as a percentage of its calibrated full scale flow and is supplied to the MFC as a voltage signal.

Mass flow controllers require the supply gas or liquid to be within a specific pressure range. Low pressure will starve the MFC of fluid and cause it to fail to achieve its setpoint. High pressure may cause erratic flow rates.

MFC application

1.CVD machine

What is CVD

hemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films.

In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

Microfabrication processes widely use CVD to deposit materials in various forms, including: monocrystallinepolycrystallineamorphous, and epitaxial. These materials include: silicon (dioxidecarbidenitrideoxynitride), carbon (fibernanofibersnanotubesdiamond and graphene), fluorocarbonsfilamentstungstentitanium nitride and various high-k dielectrics.

 

2.Valve manifold box/panel (VMB/VMP)

What is VMB/VMP

Through our experiences of handling gases, we have acquired the knowledge to design and manufacture gas panel (gas box) of EPI system and MOCVD, material supply system etc.
Achievements in our business, we are able to design and manufacture to meet customer’s request (price and specification). We can handle the hub ring air supply of liquefied gases not just only normal gases. We also support with var-ous kind of legal application.

Flow Rang

Model TMFC125V TMFC125VD TMFC125A TMFC125AD
Flow Range(N2) 30~100SLM 30~100SLM 30~100SLM 30~100SLM
Response Time ≦2.0 sec
Accuracy ±1.0 % FS
Repeatabllity ±0.25 % FS
Proof Pressure 1000 PSIG
Leak rate 1 x 10-9 atm.cc/sec or less
Working temperature Range 0~50℃
 

Materials of parts in contact w/gases

Body:SUS316
Valve seat:Vition™(Option Bura™ or Kalrez™ or Teflon™)
 

Joint

Standard:3/8″ compression
Option: 1/8″ Compression or VCR™, 1/4 Compression or VCR™
Electrical connections Dsub 15-pin male connector per standards
Flow rate input signals 0~5 Vdc 0~5 Vdc+RS-485 4~20mA 4~20mA+RS-485
Flow rate output signals 0~5 Vdc 0~5 Vdc+RS-485 4~20mA 4~20mA+RS-485
Required power supply +15~28 Vdc/350mA
 

 

Option display

Use to Type ◎Yes No ◎Yes No
Display interface Option:Interface or Separate Type(With Cable Line 1M or 3M) for TMFC125V/A only
communication

Interface

Digital: RS485 (default) / DeviceNet™ for TMFC125V/A only
Power supply AC110~240 V for TMFC125V/A only
Coming Soon Function

Order Information

Order Information
TMFC Code Flow Range
 

125 30~100SLM
300 100~300SLM
500 300~1000SLM
 

Code In/Out Signal
V 0~5Vdc(Standard Type)
A 4~20mA
VD 0~5Vdc+RS-485(Can’t use to option display type)
 

AD
4~20mA+RS-485(Can’t use to option display type)
Code Fitting Size
2 1/8″
4 1/4″
6 3/8″(Standard Type for TMFC125/300)
8 1/2″(Standard Type for TMFC500)
 

Code Fitting Type
A Compression SWL
V Male VCR
 

Code Seal
V Viton(Standard Type)
B Buna
K Kalrez
T Teflon
Code Option Display Function#1
N Without(Standard Type)
I Interface Type
D Separate Type with Cable Line 1M
E Separate Type with Cable Line 1M
Code Option Display Remove#2
R Digital RS485(Standard Type)
D Device Net
 

TMFC Complete Ordering Code
*Note:All Model come with Power Supply(+15~28 Vdc/350mA)
*Note:Using customer Logo launch to more than 100 united for  one year
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